Do some research about the company, find a recent news story that relates to the role you're interviewing for or some press release they did, form one of your "Do you have any questions for us?" to involve that. Makes higher ups feel important and like normal people care about the company.

Another I used with decent success was to ask at the end if anything brought up during the interview or on your resume was something they had reservations about that way you have an opportunity to answer rather than it just lingering in their head.

Depends on your role, if it's technical this doesn't work as well, but if it's more people oriented I usually end by asking about their dream vacation. It leaves them feeling happy thinking about it because higher ups usually want to flaunt some vacation they just took and get to reminisce then they invariably ask you and you have a chance to humanize yourself because they rarely ask about your hobbies or interests in my experience. Saving it til the end means you're a bit more memorable with the good experience they now associate and makes any concerns stick out less